TSMC also developed a 2nd generation of their 7nm process. This is an optimized process which uses the same design rules and DUV and is unrelated to 7nm+ which is EUV-based. This process is entirely design-compatible with the first generation but enjoys additional power and performance enhancements. For their second generation process, TSMC made some additional optimizations.
- Fin profile Optimizations
- Epi Optimizations
- MOL resistance Optimizations
- FEOL capacitance
- Metal gate Optimizations
All in all,
the 2nd-generation 7nm process is said to deliver over 5% improvement in performance. Additionally, at the same leakage, at high frequencies, the second-generation 7nm process has improved the Vmin by 50 mV. Qualcomm has stated that the second-generation 7-nanometer node will be used for their next-generation cellular 5G modem which will deliver 2x peak data rate over their first-generation 5G modem.