RCdelay= 2ρε(4L²/P²+L²/T²)
The speed of an electrical signal in an IC is governed by two components – the switching time of an individual transistor, known as transistor gate delay, and the signal propagation time between transistors, known as RC delay (R is metal wire resistance, C is interlevel dielectric capacitance):
RCdelay= 2ρε(4L²/P²+L²/T²) ,
where: ρ is metal resistivity, ε – permittivity of the interlevel dielectric (ILD) (ε is referred to as k in this field), L – line length, P – metal pitch, T – metal thickness.
The speed of an electrical signal in an IC is governed by two components – the switching time of an individual transistor, known as transistor gate delay, and the signal propagation time between transistors, known as RC delay (R is metal wire resistance, C is interlevel dielectric capacitance):
RCdelay= 2ρε(4L²/P²+L²/T²) ,
where: ρ is metal resistivity, ε – permittivity of the interlevel dielectric (ILD) (ε is referred to as k in this field), L – line length, P – metal pitch, T – metal thickness.