Most of the problems with going to 0.13 um have centered around the dielectrics (which (hopefully) is well understood and reasonably under control going forward to 0.09 um). I wasn't really up to date on the issues described John Cohn (IBM) here:
http://www.eet.com/printableArticle?doc_id=OEG20021114S0027
Entropy
http://www.eet.com/printableArticle?doc_id=OEG20021114S0027
Entropy