I'm fairly confident that this DRAM density is for a dedicated DRAM process (stacked capacitor) and not a logic process (trench capacitor).
With the shift to 90 nm, the embedded DRAM structure will change to a trench capacitor type from the stacked capacitor structure.
V3 said:So those eDRAM going going to be densed.
Embedded DRAM cell:
High-speed data processing requires a single-chip solution integrating a microprocessor and embedded large volume memory. Toshiba is the only semiconductor vendor able to offer commercial trench-capacitor DRAM technology for 90nm-generation DRAM-embedded System LSI. Toshiba and Sony have utilized 65nm process to technology to fabricate an embedded DRAM with a cell size of 0.11um2, the world's smallest, which will allow DRAM with a capacity of more than 256Mbit to be integrated on a single chip.
Embedded DRAM cell:
High-speed data processing requires a single-chip solution integrating a microprocessor and embedded large volume memory. Toshiba is the only semiconductor vendor able to offer commercial trench-capacitor DRAM technology for 90nm-generation DRAM-embedded System LSI. Toshiba and Sony have utilized 65nm process to technology to fabricate an embedded DRAM with a cell size of 0.11um2, the world's smallest, which will allow DRAM with a capacity of more than 256Mbit to be integrated on a single chip.
Gubbi said:Trench capacitors uses a horizontal (trench) structure, stacked a vertical.
So density will be worse
There are two basic camps today on how this can be done. IBM and Infineon advocate the trench capacitor approach, and the rest of the DRAM industry is by and large looking for ways to build a better stacked capacitor.
The vertical transistor DRAM cell developed by IBM and Infineon is an extension of the trench capacitor structure buried in silicon that was developed earlier this decade by IBM, Infineon and Toshiba. The trench capacitor structure situates the transistor on top of the silicon surface and to the side of the capacitor, but the vertical transistor is different in that it is buried inside the walls of the capacitor.
A main advantage of the IBM-Infineon approach is its reduction in the size of the cell relative to the lithographic feature sized employed. Today, manufacturers are generally able to construct DRAM cells that are eight times the employed feature size squared (8F2). IBM claims it can reduce the cell size to 6F2 -- a 25% reduction compared to a traditional "folded bit line" structure -- using the same process technology. http://www.siliconstrategies.com/story/OEG19991028S0040