Xenos/Zephyr: CPU 90nm GPU 90nm eDRAM 90nm
Falcon/Opus: CPU 65nm GPU 80nm eDRAM 80nm
Jasper: CPU 65nm GPU 65nm eDRAM 80nm
GPU & eDRAM is manufactured by TSMC (GPU has always bee, eDRAM was NEC at first)
CPU is manufactured by Chartered Semiconductor, not sure has it always been or is it just the 65nm models.